DC Power Supply

Keysight E3647a

Vacuum Chamber

SCIST

Plasma etcher (RIE)

이디디 E5

ICP RIE System

(주)엘에이티

Surface Profiler (Stylus Scanner)

Kla-tencorP-17

Plasma Process System

펨토사이언스 COVANCE-MP

Parylene Coating System

펨토사이언스 LAVIDA

Mask Aligner

Suss Microtec MA 6

Manual Spin Coater

Tft

Scanning Electron Microscope

JEOL- FE-SEM( IT-500HR)