Facile fabrication of sub-20-nm nanochannels based on crystallinity-dependent anisotropic etching of silicon

Lithography-free fabrication of single crystalline silicon tubular nanostructures on large area

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talline silicon tubular nanostructures on large area.

An electrodynamic preconcentrator integrated thermoelectric biosensor chip for continuous monitoring of biochemical process.

Integrated Carbon Nanotube Array as Dry Adhesive for High‐Temperature Silicon Processing.

Fabrication of a multi-walled carbon nanotube-deposited glass fiber air filter for the enhancement of nano and submicron aerosol particle filtration and additional antibacterial efficacy.

Aligned Carbon Nanotube Arrays for Degradation‐Resistant, Intimate Contact in Micromechanical Devices.

Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms.

Switching time reduction for electrostatic torsional micromirrors using input shaping.