발행물
컨퍼런스
2008 International Conference on Microelectronics and Plasma Technology
2008
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Thermal Plasma Analyses for the PFCs Pyrolysis Process on a Large Scale
49th Annual Meeting of Division of Plasma Physics
2007
Effects of Discharge Current and Gas Flow Rate on CF4 Abatement Process by Thermal Plasma Decomposition
한국물리학회 2007 가을 학술논문발표회
Numerical Analysis on Turbulent Thermal Plasma Flow inside a Pyrolysis Reactor for Efficient Decomposition of PFCs
18th International Symposium on Plasma Chemistry
Synthesis of Carbon Nanotubes by Thermal Decomposition of Methane Using an Inductively Coupled Thermal Plasma
Comparative Study between Air and Nitrogen Thermal Plasma Processes for CF4 Decomposition