[Unit 1] Ultra-High Vacuum (UHV) 2-inch Co-Sputtering System (<1E-7 Torr)

[Unit 2] Ultra-High Vacuum (UHV) 2-inch Co-Sputtering System (<1E-7 Torr)

Ultra-High Vacuum (UHV) 1-inch Co-Sputtering System (<1E-7 Torr)

Table Sputter Coater (Safematic CCU-010 HV)

Maskless Lithography System

Rapid Thermal Annealing (RTA) System

Glove Box (VTI) - Evaporation Insitu System

Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)

Ellipsometer (Semi Lab. SE-2000)

Probe Station