김도균 교수 연구실
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인용수 0
·2024
Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating
Jae-Hwan Kim, Dohyoung Kim, Jeong-Won Cho, Heesu Hwang, Young-Soo Noh, Myeong-Ill Lee, Seung‐Muk Bae, Taehoon Cheon, Yena Oh, Dokyun Kim, Chanyoung Yoo, Seung Ho Park, Jin‐Ha Hwang
IF 5.6Ceramics International
키워드
Materials scienceVertical-cavity surface-emitting laserLayer (electronics)OptoelectronicsLaserHafniumAtomic layer depositionOxideThin filmComposite material