Effect of anion-to-cation supplying ratio on the surface morphology of AlN films grown on ZnO substrates at low temperature
Im, I, Jung, M, Koo, J, Lee, H, Park, J, Minegishi, T, Park, S, Fujii, K, Yao, T, Kil, G, Hanada, T, Chang, J
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 201001