발행물
컨퍼런스
Microprocesses and Nanotechnology 2004
2004
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High Throughput Elctron Beam Recorder with Arrayed Microcolumns
한국물리학회
Fabrication of Sub-wavelength Size Aperture on Nearfield Optical Probe Cantilever
Trends in Nanotechnology
Fabrication of high throughput NSOM probe using relfow process of bimetallic layer
Micro and Nano Engineering
Arrayed Microcolumn Operation with a Wafer-scale Einzel Lens
Influence of electron beam on the nano-aperture formation on oxide probe array