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Polymer Layer based Surface Kinetic Model on Silicon Dioxide Etch Process in Inductively Coupled Fluorocarbon Plasmas

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ZnO nanosire devices based on novel functionalization platform for chemical and biological applications

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Study on Active Sites of Methanol Reforming Catalyst Based on Hetrostructure Cu nanodot/ZnO nanowire

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Predictable modeling of fluorocarbon plasma etch process for 3D feature profile simulation

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Surface Kinetic Studies on Oxide Etch Process in Inductively Coupled C4F6/O2/Ar Plasmas