Effect of Dry Etching Conditions on Surface Morphology and Optical Properties of GaN Films in Cl2-Based Inductively Coupled Plasmas

Dry Etching of SrBi2Ta2O9 Thin Films in Cl2/NF3/O2/Ar Inductively Coupled Plasmas

Level Set Approach to Simulation of Etch Profile Evolution in a High Density Plasma Etching System

Cl2/Ar 유도 결합 플라즈마를 이용한 SiC박막 식각특성

Plasma Chemistries for Dry Etching of SrBi2Ta2O9 Thin Films

새로운 ICP를 이용한 고온 초전도체의 Dry Etching과 기존의 Wet Etching 기술과의 비교

Cl2-Based Dry Etching of GaN Films under Inductively Coupled Plasma Conditions

Fast Dry Etching of Doped GaN Films in Cl2-Based Inductively Coupled High Density Plasmas

FRAM 소자응용을 위한 SrBi2Ta2O9 박막의 고밀도 플라즈마 식각

Wall-to-Bed Heat Transfer in a Circulating Fluidized Bed for the Reduction of Iron Ore Particles