Geunyoung Kim†, Younghyun Lee, Jae Bum Jeon, Woon Hyung Cheong, Woojoon Park, Hanchan Song, Kyung Min Kim*
Advanced Materials, 2023
20
Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection
Jungkyun Kim†, Hakseung Rhee†, Myeong Won Son, Juseong Park, Gwangmin Kim, Jae Bum Jeon, Hanchan Song, Geunwoo Kim, Byong-Guk Park, Jeong Hwan Han*, Kyung Min Kim*