부산대학교 공동연구기기동 604호
TMP_RF magnetron sputtering system
TMP_RF magnetron sputtering system: various oxide materials (Fe2O3, In2O3, NiO, V2O3, etc)
DC magnetron sputtering system
DC magnetron sputtering system: metal (FeRh, Al, etc)
Mini DP_RF sputtering system
Mini DP_RF sputtering system: vanadium oxides group (V2O3, VO2 and V2O5)
Mini DC sputtering system
Mini DC sputtering system: metal & dewetting (Ti, V, Al, Ni, Co, Mn, etc)
Flash evaporator
Flash evaportator: cobalt, Al, etc
Pulsed laser deposition system (in-pre.)
Pulsed laser deposition system: Ti oxides groups, etc
Flash evaportator
cobalt, Al, etc