Experimental investigations on particle contamination of masks without protective pellicle during vibration or shipping of mask carriers

Experimental investigations of protection schemes for extreme ultraviolet lithography masks in carrier systems against horizontal aerosol flow

Numerical evaluation of protection schemes for EUVL masks in carrier systems against horizontal aerosol flow

Evaluation of protection schemes for extreme ultraviolet lithography (EUVL) masks against top-down aerosol flow

Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions

레이놀즈 수에 따른 평판위 실린더 주위의 유체흐름

침강하는 물체의 종말속도 측정을 통한 항력계수 평가

전이영역에서 레이놀즈수에 따른 마찰계수 측정

Tech Note: Concepts for protection of EUVL masks from particle contamination

Effect of reverse flow by differential pressure on the protection of critical surfaces against particle contamination