발행물

논문
저서
컨퍼런스

전체 논문

132

121

Investigation of thermophoretic protection with speed-controlled particles at 100, 50, 25 mTorr
김정현
J. Vac. Sci. Technol. B - 직접입력, 2006

122

Speed-controlled particle injection into a low pressure system
김정현
Journal of Vacuum Science and Technology A - 직접입력, 2006

123

Analytical modeling of particle stopping distance at low pressure to evaluate protection schemes for EUVL masks
김정현
Applied Physics Letters - 직접입력, 2005

124

Modeling of protection schemes for critical surfaces under low pressure conditions: comparison of analytical and numerical approach
김정현
J. Vacuum Sci. Technol. B - 직접입력, 2005

125

Protection schemes for critical surface in vacuum environments
김정현
J. Vacuum Sci. Technol. A - 직접입력, 2005

126

Slip correction measurement of certified PSL nanoparticles using a nano-DMA for Knudsen number from 0.5 to 83
김정현
J. Res. Natl. Inst. Stand. Technol. - 직접입력, 2005

127

Influence of particle oxide coating on light scattering from submicron metal particles on silicon wafers
김정현
Applied Physics Letters - 직접입력, 2004

128

Polarized light scattering by dielectric and metallic spheres on oxidized silicon surfaces
김정현
Applied Optics - 직접입력, 2004

129

Cosolvent-assisted spray pyrolysis for the generation of metal particles
김정현
Journal of Materials Research - 직접입력, 2003

130

Polarized light scattering by dielectric and metallic spheres on silicon wafers
김정현
Applied Optics - 직접입력, 2002