DLTS (77K~650K)

AFM/SKPM

FTIR

Gas-Sensor Meas. Systems

Probe Station

Multi-channel I-V Measurements

Semiconductor Parameter Analyzer

Femto- up to 50 A, 3000 V

Thin Film Deposition/Metallization & Patterning

E-Beam Evaporator, DC-/RF- Sputter, Mask-Aligner, RIE, RTA, High-Temperature Furnace; (~1700 K)