발행물
컨퍼런스
2011 KACG International Symposium on Crystal Growth(ISCG)
2011
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High density plasma etching of InGaZnO4 films in BCl3/Ar and BCl3/O2 inductively coupled plasma
6th International Conference on Advanced Materials Development and Performance(AMDP 2011)
Preparation and characterization of refractory ceramic thin films coated by metallo-organic deposition on Inconel 617
한국세라믹학회(춘계)
Characterizations of ZnO nano-powders hydrothermally prepared at low-temperature under high-pressure
한국결정성장학회(춘계)
High temperature properties of TiAlN- and TiZrN-coated inconel 617
2010 International Symposium on Crystal Growth
2010
Comparison of chlorine- and fluorine-based inductively coupled plasma for dry etching of ZnO films