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대표 연구 분야

Advanced thin film deposition technique for semiconductor devices

상세 설명

Advanced thin film deposition technique for semiconductor devices - Self-saturation mechanism - Atomic level thickness control - Large are uniformity - Good conformality - Excellent repeatability - Flat and smooth surface

키워드

Self-saturation mechanism

Atomic level thickness control

Large are uniformity

Good conformality

Excellent repeatability

Flat and smooth surface

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관련 자료

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