대표 연구 분야
Advanced thin film deposition technique for semiconductor devices
상세 설명
Advanced thin film deposition technique for semiconductor devices - Self-saturation mechanism - Atomic level thickness control - Large are uniformity - Good conformality - Excellent repeatability - Flat and smooth surface
키워드
Self-saturation mechanism
Atomic level thickness control
Large are uniformity
Good conformality
Excellent repeatability
Flat and smooth surface
관련 이미지
관련 자료