|김호준 교수 연구실
홈
연구 영역
기본 정보
논문·특허
과제
구성원
The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024)
Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment
구분
국외
국가
대한민국
컨퍼런스명
The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024)
발표 제목
Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment
기관명
The Korean Vacuum Society
참여 연도
2024
상세 설명
The Korean Vacuum Society