The Korean International Semiconductor Conference & Exhibition on Manufacturing Technology 2024 (KISM 2024 BUSAN)

Introduction to two-phase flow analysis techniques for fluid dynamic analysis of cleaning processes: volume of fluid, level set, and volume of fluid - level set coupling methods

2024

2024 International Forum on Functional Materials

Computer simulation study for the design of a capacitively coupled plasma reactor for efficient formation of silicon nano particles

2024

3RD INTERNATIONAL FUSION AND PLASMA CONFERENCE (iFPC 2024)

DFT Analysis of The Adsorption of SinH2n+1 on Silicon Surfaces using SiH4/Ar Capacitively Coupled Plasmas for Fast and Uniform Deposition

2024

2024 한국표면공학회 춘계학술대회 특별강습회

플라즈마 공정과 시뮬레이션

2024

The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024)

Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment

2024