발행물
컨퍼런스
GEC
2023.10
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A Study on the Hydrogen Plasma induced material damage for EUV lithography Components and Material evaluation
Korean International Semiconductor Conference on Manufacturing technonlogy
2022.11
A quantitative evaluation system for EUV material damage caused by hydrogen plasma
2021.10
A new atmospheric pressure plasma jet source with two plasma regions
2017 IEEE Symposium on Radio-Frequency Integration Technology (RFIT)
2017.09
X-Band GaN MMIC Power Amplifier for the SSPA of a SAR System
300 W GaN power amplifier for LTE applications