Spatial Distribution of Interface Traps in Sub-50-nm Recess-Channel-Type DRAM Cell Transistors
Chung EA (Chung, Eun-Ae), Jin G (Jin, Gyoyoung), Moon JT (Moon, Joo-Tae), Kim S (Kim, Sangsig), Kim YP (Kim, Young-Pil), Park MC (Park, Min-Chul), Nam KJ (Nam, Kab-Jin), Lee SS (Lee, Sung-Sam), Min JY (Min, Ji-Young), Yang G (Yang, Giyoung)
IEEE ELECTRON DEVICE LETTERS, 2011