MBD( Molecular Beam Deposition)
IBAD(Ion Beam Assisted Deposition)
PVT (Physical Vapor Transport System)
Physical vapor transport sytem for the growth of CdS, CdSe, ZnTe, etc.
RTP(Rapid Thermal Process)
Rapid Thermal Annealing and Oxidation System (home built)
Electrical Measurement System
Micro PL (Photoluminescence)/Raman System
UV-Vis Spectrophotometers
Common facilities (TEM, FESEM, XRD, etc.)
UHV System
Metal thin film deposition with 4 effusion cells Double Chamber Base Pressure: 1×10-8 torr Double Kaufman Ion Guns 4 targets Substrate heating up to 800℃
Temperature Variable Probe Station (home built)