발행물
컨퍼런스
Proceedings of the 32nd International Symposium on Robotics (ISR 2001) and the 1st Intelligent Microsystem Symposium (IMS 2001)
2021.04
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Fabrication of ionic polymer metal composites by electroless plating of Pt
Proceedings of SPIE in Micromachining and Microfabrication Process Technology VI
2000.09
Design and fabrication of a micromechanical inverter
Proceedings of SPIE's 7th Annual International Symposium on Smart Structures and Materials
2000.03
Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump
Proceedings of SPIE - Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures
1999.12
Micromirror actuation with electrostatic force and plate bending
The 11th International Photovoltaic Science and Engineering Conference (PVSEC-11)
2024.09
Experiments on anisotropic etching of Si in TMAH