Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 200701
143
레이놀즈 수에 따른 평판위 실린더 주위의 유체흐름
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J. of the institute of industrial technology - 직접입력, 200612
144
침강하는 물체의 종말속도 측정을 통한 항력계수 평가
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J. of the institute of industrial technology - 직접입력, 200612
145
전이영역에서 레이놀즈수에 따른 마찰계수 측정
김정현, 0, 0, 0, 0
J. of the institute of industrial technology - 직접입력, 200612
146
Tech Note: Concepts for protection of EUVL masks from particle contamination
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Journal of Nanoparticle Research - 직접입력, 200610
147
Effect of reverse flow by differential pressure on the protection of critical surfaces against particle contamination
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J. Vac. Sci. Technol. B - 직접입력, 200607
148
Investigation of thermophoretic protection with speed-controlled particles at 100, 50, 25 mTorr
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J. Vac. Sci. Technol. B - 직접입력, 200605
149
Speed-controlled particle injection into a low pressure system
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Journal of Vacuum Science and Technology A - 직접입력, 200603
150
Analytical modeling of particle stopping distance at low pressure to evaluate protection schemes for EUVL masks