Vacuum Probestation

PARAMETER ANALYZER : KEITHLEY 4200 SCS - Temperature : 80K ~ 500K - Light Source : 780 nm, 633 nm and etc 

tube FURNACE

Temperature : 200 ~ 1000 degree Celsius - Gas : Argon, Nitrogen, Forming Gas and etc

Maskless Lithography

[STANDARD SCIENCE CORPORATION](https://sdse.co.kr/) - Critical Dimension ~ 1 um, 0.8 um  - Photoresist : AZ GXR 601, AZ 5214E and etc

FUME HOOD