High-density inductively coupled plasma chemical vapor deposition of silicon nitride for solar cell application
Parm, IO (Parm, IO), Kim, K (Kim, K), Lim, DG (Lim, DG), Lee, JH (Lee, JH), Heo, JH (Heo, JH), Kim, J (Kim, J), Kim, DS (Kim, DS), Lee, SH (Lee, SH), Yi, J (Yi, J)
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002