Glove Box - Wet Station

Thin film solution processing Directly linked with Dry station 1 by middle door

Glove Box - Dry Station2

Organic and compound material vacuum processing Analysis and storage for sensitive films

Thermal Evaporator1

Inside the Dry station1 Inorganic materials and metal vacuum processing

Thermal Evaporator2

Inside the Dry station2 Organic and Compound material vacuum processing Low-temperature thermal evaporation available.

Spin Coater1

Inside the Wet station Thin film solution processing

Spin Coater2

Inside the Fume Hood Thin film soluton processing

Reactive Ion Etcher

Device fabrication and patterning Available for Argon and Oxygen for now

Rapid Thermal Annealing Machine

Vacuum annealing, annealing process in specific gas flow condition available

Electro-spinning Machine

Functional Nano-material Fabrication

O2 Plasma Generator

Substrate cleaning and adhesion improvement Post-treatment for surface passivation