Uv-Ozone Generator

Substrate cleaning and adhesion improvement Co-using with Prof. Young Hoon, Kim's Lab

Uv-Exposure Machine1

Using for DUV, EUV PR developement Inside the Fume Hood

Uv-Exposure Machine2

Using for DUV, EUV PR developement Inside the Drystation1

Hall Measurement Equipment

Electrical property characterization

Vacuum Probe Station

Device characterization

Probe Station Set Inside Glove Box

Inside Dry station2 Device Characterization setting for sensitive films

Optical Microscope

Basic Analysis tool for surface morphology characterization

Seeback Measurement Set

Thermoelectirc property characterization