Atomic Layer Etching Mechanism of MoS2 for Nanodevices
Kim, KS[Kim, Ki Seok], Kim, KH[Kim, Ki Hyun], Nam, Y[Nam, Yeonsig], Jeon, J[Jeon, Jaeho], Yim, S[Yim, Soonmin], Singh, E[Singh, Eric], Lee, JY[Lee, Jin Yong], Lee, SJ[Lee, Sung Joo], Jung, YS[Jung, Yeon Sik], Yeom, GY[Yeom, Geun Young], Kim, DW[Kim, Dong Woo]
ACS APPLIED MATERIALS & INTERFACES, 201704