Hydrogenated Amorphous Silicon Thin Film Transistors with a single Layered SiO2 Gate Insulator

Low Dielectric Constant Fluorinated Oxide Films Prepared by Remote plasma Chemical Vaper Deposition

이온 샤우어도핑을 이용한 자기정렬 방식의 APCVD 비정질 박막 트랜지스터의 제작

SiF4를 이용한 저유전율 SiOF 박막 제작

Temperature-Dependant Characteristics of polycrystalline Si Thin-Film Transistors

안정성이 우수한 비정질 실리콘과 n형 미세 결정질 실리콘의 제작

Substrate temperature dependence of electrical and optical properties for the APCVD a-Si and its application to thin transistors

A study on ion shower doping in Si thin films

Fabrication of a-Si:H films using SiH2Cl2

Low temperature crystallization of a-Si film by metal contact