비정질 실리콘 박막 트랜지스터와 액정 표시 소자 구조 및 제조방법

다결정/비정질 실리콘 이중 활성층을 가지는 박막트랜지스터 및 그 제조 방법

Method for crystallizing amorphous layer

Field emitter having carbon nanotube film, method of fabricating the same, and field emission display device using the field emitter

Method fo forming carbon nanotubes

Thin film transistor and method for fabricating the same

Inductively coupled plasma chemical vapor deposition technology

Thin film transistor and its fabrication

Thin-Film Switching Device Having Chlorine-Containing Active Region and Methods of Fabrication Therefor

Inductively Coupled Plasma Chemical Vapor Deposition Apparatus