발행물
컨퍼런스
2006년도 가을 학술대회
,
Fabrication of ZnO nanowires on a wafer scale by top-down approach
AVS 6th international conference on atomic layer deposition
Fabrication of ZnO nanowires on a wafer scale by size reduction lithography
IEEE
Microstructure Development and Evolution
Integrated Multiscale Multistep Process Simulation”
ECS
Integrated Multiscale Process Simulation of Damascene Structures