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High-k, ultrathin polymer gate insulator via initiated chemical vapor deposition (iCVD) for thin-film transistor

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Multi-level Metal Interconnection Technology using iCVD Dielectric Polymer and Its Application to Organic Ics

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Fabrication of thin-film DNA extraction chip for nucleic acid extraction via initiated chemical vapor deposition

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Selective Pore-Sealing of Highly Porous Ultralow-k dielectrics for ULSI Interconnects by Cyclic Initiated Chemical Vapor Deposition Process

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Flexible and tunable parylene thin film microlens array