Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young`s modulus
Park, JM[Park, Jong-Min], Choi, JK[Choi, Jong-Kil], An, CJ[An, Cheng-Jin], Jin, ML[Jin, Ming-Liang], Kang, SW[Kang, Sang-Woo], Yun, JY[Yun, Ju-Young], Kong, BS[Kong, Byung-Seon], Jung, HT[Jung, Hee-Tae]
JOURNAL OF MATERIALS CHEMISTRY C, 201304