Semiconductor Analyzer (keithley 2635b)

Specifications single-channel model with 30W power output 4 quadrant source/measure with 6-digit resoulution Max/min voltage: 200 V / 100 nV Max/min current: 1.5 A DC, 10 nA pulse/100 fA

Water Splitting Device

Specifications solar simulator a 150 W [Xenon](https://www.sciencedirect.com/topics/chemistry/xenon) lamp potentiostat (VSP-300, Biologic)

Lock-in Amplifier

1 mHz to 102.4 kHz range >100 dB dynamic reserve 5 ppm/°C stability 0.01 degree phase resolution Time constants from 10 µs to 3 ks (up to 24 dB/oct rolloff) Auto-gain, -phase, -reserve & -offset Reference source GPIB and RS-232 interfaces

Furnace

Temperature: ~ 850 °C

RTA(Rapid Thermal Annealing)

Specifications Temperature: ~1000℃ Max. 4'' wafer O2 500 sccm, N2 500 sccm 220 V/ 75 A/ 3 phase Installed halogen lamps horizontally above and below the Quartz chamber