30.1 A 28Gb/mm<sup>2</sup>4XX-Layer 1Tb 3b/Cell WF-Bonding 3D-NAND Flash with 5.6Gb/s/Pin IOs
Sangsoo Park, Jae-Doeg Lyu, Myungjun Kim, Jaeyun Lee, Young Woong Song, Chung-Ho Yu, Makoto Hirano, Yongseok Kwon, Jonghoon Park, Ho-Joon Kim, D Lee, Dong‐Hyun Seo, Byungrok Go, Seongho Jeon, Y. H. Kim, Doo-Hyun Kim, Youngmin Jo, Hyun-Jun Yoon, Junehong Park, In-Mo Kim, Sung‐Hoon Kim, Hokil Lee, Je-Hyeon Yu, Sanglok Kim, Hsiang-Sheng Ku, Jungmin Seo, Jindo Byun, Seung-Hyeon Yun, Kyoungtae Kang, Seung-Beom Kim, Yohan Lee, Yong Kyu Lee, Kyung‐Hwa Kang, Han-Jun Lee, Young-Gyoon Ryu, Hyundo Kim, Wontae Kim, Hyeongdo Choi, Juho Jeon, An-Soo Park, Raehyun Song, Jae-Hwan Kim, Jung Soo Kim, Hwa-Seok Lee, M. S. Lee, Jae-Ick Son, Ji-Ho Cho, Moosung Kim, Jae-Woo Im, Jong-Min Park, Hyuck‐Joon Kwon, Youngdon Choi, Chi-Weon Yoon, Seungjae Lee, Ki‐Whan Song, Sung‐Hoi Hur
With the ever-increasing demand for AI and data-intensive applications, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$3\mathrm{D}$</tex> NAND Flash memories [1]–[6] need to achieve both high-density and high-speed IOS. Higher density can be attained by removing dummy holes in the cell array and increasing the number of stacked WLs. However, removal of dummy holes renders the GSL-cut process inapplicable [3]; thus, increasing power consumption due to the capacitance of unselected strings. Moreover, as the number of WLs increases, the amount of pass-voltage disturbance, which is directly related to the number of unselected WL, thereby deteriorating cell reliability. In addition, increased WL capacitance result in degradation of the program <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\mathrm{t}_{\text{PROG}})$</tex> and read <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\mathrm{t}_{\mathrm{R}})$</tex> time. Achieving high-speed <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{IOS}$</tex> also poses signal-integrity (SI) challenges: stringent eye-width (EW) and eye-height (EH) requirements; while also maintaining high 10 bandwidth and low-power consumption.