The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)
Effect of H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
2025
2025
The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)
Atomic Layer Deposition of Ru Using New Zero-Oxidation State Ru precursor
2025
2025
The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)
Plasma-enhanced atomic layer deposition of MoCx thin films using a liquid Mo precursor
2025
2025
2025 한국세라믹학회 춘계학술대회
Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications
2025
2025