Surface Al doping of 4H-SiC via low temperature annealing
Park, J (Park, Junbo), Kim, KH (Kim, Ki-hwan), Park, YR (Park, Young-Rak), Kim, M (Kim, Minki), Lee, H (Lee, Hyungseok), Jun, CH (Jun, Chi-Hoon), Koo, S (Koo, Sangmo), Ko, SC (Ko, Sang Choon)
APPLIED PHYSICS LETTERS, 201607