발행물

전체 논문

235

221

Ferroelectric Emission Studies for Electron Emission Lithography Application
정지원
Proceedings of the 14th IEEE International Symposium on Applications of Ferroelectrics, 2001

222

High Density Plasma Etching of Iridium Thin Film for Ferroelectric Random Access Memory
10055870
화학공학의 이론과 응용 - 직접입력, 200001

223

Pt/PZT/TiO2 Gate Stack Etching by Using TiO2 Hard Mask for Metal-Ferroelectric-Insulator-Semiconductor FETs
정지원
198th International Electrochemical Society meeting, 1999

224

Crystallization and Electrical Properties of Bi4Ti3O12 Films Derived from Bismuth Acetate and Bismuth Nitrate Precursor Solutions
정지원
Materials Research Society Symposium Proceedings, 1998

225

Investigation of Etch Profiles in etching of PZT and Pt thin films
정지원
Materials Research Society Symposium Proceedings, 1998

226

Metalorganic Chemical Vapor Deposition of Ferroelectric Pb(ZrXTi1-X)O3 Thin Films
10055870
The Korean Journal of Chemical Engineering - 등재, 199701

227

Preparation and Characterization of PZT Thin Films on RuOX/Pt Multilayered Electrode by MOCVD
정지원
Materials Research Society Symposium Proceedings, 1997

228

Formation of Metal-Ferroelectric-Insulator-Semiconductor Structure for Single Transistor Memory
정지원
The 52nd Symposium on Semiconductors and Integrated Circuits Technology, 1997

229

Characterization of Sol-Gel Precursor Solutions for the preparation of Pb(ZrXTi1-X)O3 Thin Films
정지원
Proceedings of ''97 KIChE, 1997

230

Dry Etching of Pt/Pb(ZrXTi1-X)O3/Pt Thin Film Capacitors in an Inductively Coupled Plasma (ICP) for Nonvolatile Semiconductor Memory Applications
정지원
Proceedings of ''97 KIChE, 1997