Method for delta-doping in GaAs epitaxial layer grown on silicon substrate by metalorganic chemical vapor deposition

Heater for chemical vapor deposition equipment

Quantum wire fabrication method using GaAs/AlGaAs substrate

Growth control method of side wall epitaxial layer of semiconductor mesa and V-grooved structures

Epitaxial growth rate varying method for side surface of semiconductor pattern

Fabrication method of optical and electrical blocking structure of optoelectronic devices using lattice mismatch

Fabrication method of half dome structure for highly efficient opto-electronic devices

Fabrication method of current blocking structure for optoelectronic devices using oxidized aluminum gallium arsenide

Fabrication method of high density quantum dot array by selective growth

Fabrication method of current blocking structure for optoelectronic devices