Fabrication of a Bottom Electrode for a Nano-scale Beam Resonator Using Backside Exposure with a Self-aligned Metal Mask

High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas

Comparison of chlorine- and fluorine-based inductively coupled plasmas for the dry etching of PZT films

Density Functional Theoretical Study on Redox-Dependent Hydrogen Bonding between Amide and Arylurea

Multi-port RF MEMS 스위치의 연구 동향

Symmetric AFM cantilever for mechanical characterization of Mo thin films

Novel compact low-loss millimeter-wave filters using micromachined overlay and inverted overlay coplanar waveguide transmission lines with defected gr

Residual stress evaluation of thin film using strip bending test

study of nano-indentation test using rhombus-shaped cantilever in atomic force microscope

MEMS-based compact dual-band bandpass filters with applications to wireless local area network