발행물

전체 논문

258

251

Packaging for RF MEMS devices using LTCC substrate and BCB adhesive layer
10188872
Journal of Micromechanics and Microengineering - 직접입력, 200601

252

Mechanical characterization of gold thin films based on strip bending and nanoindentation test for MEMS/NEMS applications
10188872
Sensors and Materials - 직접입력, 200510

253

Millimeter-Wave MEMS tunable low pass filter with reconfigurable series inductors and capacitive shunt switches
10188872
Microwave and Wireless Components Letters - 직접입력, 200510

254

A mechanically reliable digital-type single crystalline silicon(SCS) RF MEMS variable capacitor
10188872
Journal of Micromechanics and Microengineering - 직접입력, 200510

255

Force-calibrated AFM for mechanical test of freestanding thin films
10188872
KEY ENGINEERING MATERIALS - 직접입력, 200507

256

Direct nanomechanical machining of gold nanowires using a nanoindenter and an atomic force microscope
10188872
Journal of Micromechanics and Microengineering - 직접입력, 200503

257

The SiOG-based single crystalline silicon (SCS) RF MEMS switch with uniform characteristics
10188872
Journal of Microelectromechanical Systems - 직접입력, 200412

258

A micromachined two-state bandpass filter using series inductors and MEMS switches for WLAN applications
10188872
Journal of Semiconductor Technology and Science - 직접입력, 200411