한국해양정보통신학회 추계학술대회

Sensitivity Analysis of Plasma Charge-up Monitoring Sensor Using Neural Networks

KISM 2024

The Reaction Mechanism Changes of the Carbonyl Fluoride Dissociation and the Eco-Friendly Chamber Dry Cleaning Process

2024

KISM 2024

Effect of Gas Injection Velicity on TiN Films in Thermal Atomic Layer Deposition Process

2024

KISM 2024

Fault Detection and Classification for SiH4 MFC using a New Diagnostic Ratio in Plasma-Enhanced Chemical Vapor Deposition

2024

KISM 2024

Analysis of COF2/O2/Ar in the Cleaning Process of Silicon Nitride in Plasma-Enhanced Chemical Vapor Deposition Chamber Deposition

2024