Yook S. J., Fissan H., Engelke T., Asbach C., Van Der Zwaag T., Kim J. H., Eschbach F., Wang J., and Pui D. Y. H., Controlled Deposition of SiO2 Nanoparticles of NIST-Traceable Particle Sizes for Mask Surface Inspection System Characterization.
Yook S. J., Fissan H., Engelke T., Asbach C., Van Der Zwaag T., Kim J. H., Eschbach F., Wang J., Pui D. Y. H.
IEEE Transactions on Semiconductor Manufacturing, 1970