발행물

전체 논문

206

61

Kim J. H., Fissan H., Asbach C., Yook S.-J., Pui D. Y. H., and Orvek K. J.,  Investigation of Thermophoretic Protection with Speed-Controlled Particles at 100, 50, and 25 MTorr.
Kim J. H., Fissan H., Asbach C., Yook S.-J., Pui D. Y. H., Orvek K. J.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1970

62

Kim J. H., Fissan H., Asbach C., Yook S.-J., and Pui D. Y. H.,  Speed-Controlled Particle Injection into a Low-Pressure System.
Kim J. H., Fissan H., Asbach C., Yook S.-J., Pui D. Y. H.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1970

63

Asbach C., Kim J. H., Yook S. J., Pui D. Y. H., and Fissan H.,  Analytical Modeling of Particle Stopping Distance at Low Pressure to Evaluate Protection Schemes for Extreme Ultraviolet Lithography Masks.
Asbach C., Kim J. H., Yook S. J., Pui D. Y. H., Fissan H.
Applied Physics Letters, 1970

64

Asbach C., Pui D. Y. H., Kim J. H., Yook S.-J., and Fissan H.,  Modeling of Protection Schemes for Critical Surfaces under Low Pressure Conditions: Comparison between Analytical and Numerical Approach.
Asbach C., Pui D. Y. H., Kim J. H., Yook S.-J., Fissan H.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1970

65

Kim J. H., Asbach C., Yook S.-J., Fissan H., Orvek K. J., Ramamoorthy A., Yan P.-Y., and Pui D. Y. H.,  Protection Schemes for Critical Surface in Vacuum Environments.
Kim J. H., Asbach C., Yook S.-J., Fissan H., Orvek K. J., Ramamoorthy A., Yan P.-Y., Pui D. Y. H.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1970

66

Kim J. H., Mulholland G. W., and Kukuck S. R.,  Slip Correction Measurements of Certified PSL Nanoparticles Using a Nanometer Differential Mobility Analyzer (Nano-DMA) for Knudsen Number From 0.5 to 83.
Kim J. H., Mulholland G. W., Kukuck S. R.
Journal Of Research Of The National Institute Of Standards And Technology, 1970

67

Kim J. H., Ehrman S. H., and Germer T. A.,  Influence of Particle Oxide Coating on Light Scattering by Submicron Metal Particles on Silicon Wafers.
Kim J. H., Ehrman S. H., Germer T. A.
Applied Physics Letters, 1970

68

Kim J. H., Ehrman S. H., Mulholland G. W., and Germer T. A.,  Polarized Light Scattering by Dielectric and Metallic Spheres on Oxidized Silicon Surfaces.
Kim J. H., Ehrman S. H., Mulholland G. W., Germer T. A.
Applied Optics, 1970

69

Kim J. H., Babushok V. I., Germer T. A., Mulholland G. W., and Ehrman S. H.,  Cosolvent-Assisted Spray Pyrolysis for the Generation of Metal Particles.
Kim J. H., Babushok V. I., Germer T. A., Mulholland G. W., Ehrman S. H.
Journal of Materials Research, 1970

70

Germer T. A., Mulholland G. W., Kim J. H., and Ehrman S. H.,  Measurement of the 100 Nm NIST SRM 1963 by Laser Surface Light Scattering.
Germer T. A., Mulholland G. W., Kim J. H., Ehrman S. H.
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, 1970