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Development of highly sensitive and stable SAW-based temperature sensor array and its interface electronics for real-time monitoring of wafer surface temperature in plasma chamber

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Advanced Corona Detection System : FPGA-PC Collaboration with Python Analysis

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Improvement of the circuit comprising SAW sensor and oscillator

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Development of highly sensitive and fast solar blind SAW corona sensor array and interface electronics

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Effective light beam modulation and filtering by PZT actuation in FPI (Fabry Perot Interferometer)