PE-ALD 장비 입고

Plasma-Enhanced ALD

Thermal ALD

Hollow Cathode Plasma ALD

Plasma-Enhanced & Thermal ALD

2-Zone Furnace CVD (2D materials)

1-Zone Furnace CVD (2D materials)

Sputter (shared eq.)

E-Beam evaporator (shared eq.)

Reactive Ion Etching system (shared eq.)