Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap
Jang, WW[Jang, Weon-Wi], Lee, JO[Lee, Jeong-Oen], Yoon, JB[Yoon, Jun-Bo], Kim, MS[Kim, Min-Sang], Lee, JM[Lee, Ji-Myoung], Kim, SM[Kim, Sung-Min], Cho, KH[Cho, Keun-Hwi], Kim, DW[Kim, Dong-Won], Park, DG[Park, Dong-Gun], Lee, WS[Lee, Won-Seong]
APPLIED PHYSICS LETTERS, 2008