Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer
Kim, D (Kim, Dongbin), Kim, T (Kim, TaeWan), Park, SH (Park, Sang Hyun), Lim, SK (Lim, Sung Kyu), Lee, HC (Lee, Hyo-Chang), Kim, T (Kim, Taesung), Kang, SW (Kang, Sang-Woo)
JOURNAL OF VACUUM SCIENCE TECHNOLOGY A, 2018