Selective Deposition of Cobalt Oxide Thin Films via H2O-Vapor-Catalyzed Reaction
Kim, D (Kim, Dongbin), Roh, KM (Roh, Ki-Min), Mun, J (Mun, Jihun), Jin, Y (Jin, Yinhua), Lee, SJ (Lee, Sang Jun), Kim, TW (Kim, TaeWan), Jeong, SH (Jeong, Soo-Hwan), Kim, T (Kim, Taesung), Kang, SW (Kang, Sang-Woo)
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016