2007
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FTIR ANALYSIS OF PZT DAMAGE DURING WAFER LEVEL TRANSFER OF THERMO-PIEZOELECTRIC SI3N4 CANTILEVER ON CMOS-WAFER FOR NANO DATA STORAGE APPLICATIONFTIR analysis of PZT damage during wafer level transfer of thermo-piezoelectric Si3n4 cantilever on CMOS-wafer fro nano data storage application